Multiple Fano resonances driven by bound states in the continuum in an all-dielectric nanoarrays system

Fano resonance with high Q-factor can greatly enhance the light–matter interaction in all-dielectric metasurface, which is an important condition for developing high-performance micro-/nano-photonics devices. In this paper, we present metasurface structure composed of nanoarrays to investigate properties BIC realization and near-infrared spectral region. Four profiles are generated, two quasi-BIC modes excited by MD appear when structural symmetry broken. All resonances modulation depth close 100%. The response proposed also highly tunable adjusting polarization incident light geometric parameters structure. This work may provide a reference design devices, such as biochemical sensing, optical switches, modulators.